SPIE Let there be Light! High NA Kickoff! Samsung Slows? “Rapid” Decline?

SPIE Let there be Light! High NA Kickoff! Samsung Slows? “Rapid” Decline?
by Robert Maire on 03-03-2024 at 6:00 am

High NA EUV 2024

– High NA EUV’s coming out party – “Dawn” of the Angstrom Era
– Well attended, positive vibes, not much new but good progress
– Concerns about Samsung slowing spend while Intel accelerates
– KLA reticle inspection quandary – Risky business in China

SPIE was a High-NA
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