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F
I also note the data is 2-3 years old, in other words before anyone has any experience with trying to actually put high-NA into volume...
Jun 18, 2026
I
I also note the data is 2-3 years old, in other words before anyone has any experience with trying to actually put high-NA into volume...
Jun 18, 2026
F
Intel had the "confidence", from earlier (see the source years).
Jun 18, 2026
F
Well wait, the SALELE is more extendible?
Jun 18, 2026
I
So guess what N2 is... ;-)
(I didn't want to give an exact number because of NDA...)
P.S. N2P is ~0.5um smaller due to 2% linear...
Jun 18, 2026
I
Who's right then -- Intel or Fred? ;-)
Jun 18, 2026
S
Intel says you don't need Double Patterning for 0.55NA 24nm pitch
Jun 18, 2026
S
M0 for N3E is 23nm
Jun 18, 2026
I
Indeed, this must have gone thru TSMC's thinking, perhaps Samsung too?
Jun 18, 2026
F
Indeed, this must have gone thru TSMC's thinking, perhaps Samsung too?
Jun 18, 2026
F
Indeed -- but my point was that in N2 TSMC *already* have a smaller M0 pitch than single-exposure high-NA can deliver, as you said: "No...
Jun 18, 2026
I
Indeed -- but my point was that in N2 TSMC *already* have a smaller M0 pitch than single-exposure high-NA can deliver, as you said: "No...
Jun 18, 2026
F
I recall TSMC already had 28 nm pitch M0 for N5P.
Jun 18, 2026
I
Surely the biggest issue with TSMC adopting high-NA is not just the economics/throughput, but the sheer number of machines that would be...
Jun 18, 2026
I
M0 pitch in TSMC N2 is less than 24nm... ;-)
Jun 18, 2026