Interesting you mention MEMs as it was a topic of discussion here in Taiwan. Wikipedia has this list of MEMs foundries but they are not ranked. Does anyone know the current ranking? I will definitely be doing more research on this... I do know that SEMI has a MEMs Summit in Europe now and associated coverage.
[table]
|-
! class="blocksubhead" ! Company
! class="blocksubhead" ! Service
! class="blocksubhead" ! Substrate materials
! class="blocksubhead" ! Production volume
! class="blocksubhead" ! Wafer diameters (in inches)
! class="blocksubhead" ! Type
! class="blocksubhead" ! Headquartered country
|-
|
Asia Pacific Microsystems, Inc.(APM)
| MEMS foundry, MEMS manufacturing
| Glass Wafers, Quartz Wafers, Silicon Wafers, Structured Wafers, SOI Wafers and bonding material.
| High volume production
| 6
| Pure-play
|
Taiwan
|-
|
Honeywell
| MEMS manufacturing
| Silicon
| High volume production
| 4, 6
| IDM
|
United States
|-
|
Innovative Micro Technology (IMT)
| MEMS manufacturing
| Silicon
| High volume production
| 6
| Pure-play
|
United States
|-
|
iX-factory
| Customised MEMS design and manufacturing
| Silicon and SOI, glass borosilicate or quartz, structured wafer
| Prototyping and middle-sized batch production
| 4, 6, 8
| Pure-play
|
Germany
|-
|
Micralyne
| MEMS design, manufacturing and packaging; microfabrication
| Silicon, SOI and various glasses
| From scale-up to high volume production
| 6
| Pure-play
|
Canada
|-
|
Micrel
| MEMS manufacturing
| Silicon
| Low volume and prototyping
| 6
| IDM
|
United States
|-
|
Midwest MicroDevices
| MEMS and Thin Film Device Manufacturing
| Silicon, Sapphire, SOI, Glass, Quartz
| Custom Process Development, Prototype, Pre-production, Small – Medium Volume Production
| 4, 6
| Pure Play
|
United States
|-
|
Rogue Valley Microdevices
| MEMS and Biomedical design/manufacturing
| Silicon, SOI, Quartz, Glass, and Saphire
| Prototyping, Pilot, Low to Mid Volume Production
| 2, 4, 6, 8
| Pure-Play
|
United States
|-
|
Semefab
| MEMS manufacturing
|
| High volume production
| 4, 6
| Pure-play
|
United Kingdom
|-
|
Silex
| MEMS design and manufacturing
| Silicon
| High volume production
| 6, 8
| Pure-play
|
Sweden
|-
|
Sony
| MEMS design and manufacturing
| Polymer
| Prototyping and high volume production
| 6
| IDM
|
United States
|-
| STMicroelectronics
| MEMS (including accelerometers, gyroscopes, digital compasses, inertial modules, pressure sensors, humidity sensors and microphones)
| Silicon
| High volume production
|
| IDM
|
Switzerland
|-
|
Teledyne DALSA
| MEMS design and manufacturing with integration of individual foundry processes
| Silicon and polysilicon
| High volume production
| 6, 8
| Pure-play
|
Canada
|-
|
Texas Instruments
| MEMS design and manufacturing
| Silicon
| High volume production
|
| IDM
|
Taiwan
|-
|
Tower Jazz
| IC manufacturing
| Silicon
| High volume production
| 6, 8
| Pure-play
|
Israel
|-
|
Tronics
| MEMS design and manufacturing
| Silicon, SOI and glass wafer
| Prototyping, low and high volume production
| 6
| Pure-play
|
France
United States
|-
| TSMC
| MEMS design and manufacturing
| Silicon
| High volume production
| 6, 8, 12
| Pure-play
|
Taiwan
|-
| uFluidix
| Microfluidics/MEMS design and manufacturing
|
| Small-Large volume production
|
| Pure-play
|
Canada
|-
|
UMC
| MEMS manufacturing
| Silicon
| High volume production
| 8
| Pure-play
|
Taiwan
|-
|
Xfab
| MEMS design and manufacturing
| Silicon and glass
| High volume production
| 6, 8
| Pure-play
|
Germany
|-
[/table]
https://en.wikipedia.org/wiki/List_of_MEMS_foundries