Hyper NA EUV Scanner be available 10 years later (2034)?

[hskuo]

It is a big dream and very hard to achieve. Just wondering what will be tool price look like? $500M or higher?

ASML eyes common EUV platform and massive throughput increases - Bits&Chips

Hyper-NA EUV and hyperproductive tools are ASML’s main targets for the upcoming decade.

bits-chips.nl

 

[nghanayem]

10 years ago there was no EUV and ASML wasn't sure if they were doing high-NA yet. In short alot can change in ten years. With that said it is one hell of a mountain to climb.

 

[Fred Chen]

There's a question mark after 0.75NA EUV, so it's not an official thing.

 

[hskuo]

10 years ago there was no EUV and ASML wasn't sure if they were doing high-NA yet. In short alot can change in ten years. With that said it is one hell of a mountain to climb.

This ASML Investor Day in 2016 might answer your questions in the past 10 years for EUV scanner.