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Cost breakdown for development of etch and depo tools?

S

sshuham

New member
Does anyone have sources to read through on rough development timelines and costs for companies like AMAT or Lam to develop a new product line, ideally for etch or depo tools? There are public numbers on total R&D spend but I was hoping to find more specific breakdowns for NPI including prototyping, test, verification, qualification, etc.

Thanks!
 
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