Evaluate MEMS Devices out-of-fab Before Fabrication

Evaluate MEMS Devices out-of-fab Before Fabrication
by Pawan Fangaria on 03-21-2014 at 10:30 am

MEMS design and fabrication is highly complex in the sense that the fabrication process heavily depends on the design, unlike IC fabrication which has a standard set of processes. A slight change in MEMS design can alter its fabrication steps to a large extent. For example, setting device parameters such as capacitance or linear… Read More