Based on the information and the deployment map given by Mrs. Greet Storms, Senior Vice President and Head of High-NA EUV Product Management at ASML, along with other previous news reports, here is my estimate of High NA EUV machine deployment at each company or institution. Because she didn't state where and how those machines are installed or in use, I combined the 10 (installed) and 3 (being delivered or under installation) for a total of 13 units.
Current Hing NA EUV Machine Deployment:
A. Intel (Oregon): 5 (or 4)
B. Albany NanoTech Complex/IBM, Micron, Applied Materials, Tokyo Electron, ASML, Universities (Albany, New York): 1
C. IMEC (Belgium): 1
D. TSMC (Taiwan): 2
E. SK Hynix (South Korea): 2
F. Samsung (South Korea): 2 (or 3)
Total: 13 units.
Some considerations:
- 1. Because High NA EUV is still undergoing heavy development work and requires software and hardware updates, adjustments, and modifications when necessary, it's probably more practical and efficient for TSMC, SK Hynix, and Samsung to each have at least two machines to keep their R&D and testing activities on schedule. Each of them has huge profits, R&D budgets, and CapEx to support acquiring more once the major technical and productivity/yield issues are resolved.
- 2. During TSMC's annual shareholders meeting held on June 4, 2026, TSMC CEO C.C. Wei stated that TSMC had bought at least one unit of the High NA EUV machine.
- 3. There was a news report that Samsung is getting two more units in addition to the existing R&D unit. The timing is not publicly available.
- 4. Given the globally total of 13 units cited by ASML's Greet Storms, Intel may own 4 to 5 units of High NA EUV. Due to Intel's tight financial situation, it's unlikely Intel has significantly more, no more than 6 units total.
TSMC is 0.5 that is the fact the one with IMEC, no photo
Samsung 0 - no photo
Intel is 6 - 7
As mentioned ASML said 10, don't goes for 13, simply not the truth.
This is an important PR for all the party involve, have PR have machine, no PR no machine
Samsung - No ASML PR = No Machine
TSMC - No ASML PR = No Machine
Just a big month is not enough.
Remember Intel is doing High NA EUV on some of the layers for 18A/18AP with a 30-35K Wafer Per Month Range.
That is 1.5-2.0 fab count of Wafer Per Month on TSMC standard.
The number will not line up if those installed machine is not used to make 18A/AP, i.e. not enough EUV machine.
Most of the EUV machine that Intel brough previously is in Ireland (up until 2025 at least)
There is no way that Intel can achieve 30K production if they don't have in total if they don't have 40 machines (no matter EUV or high na)
there are only ~65 machine that ASML producing each year and that is like 140 machine produced in 2 years.
TSMC with all the expansion likely already have 50 of those, 20 machine is share between SK, Samsung, Rapius, ... others. it just left intel with like 30-40 machines.
A bit tight but not impossible.
Remember Intel GAA is 4 stack and TSMC is 3 stack, it is reasonable to believe that Intel needed 20% more machine even that is the same wafer per month as there is an extra stack to make.
In order to achieve the 35K mark, which is necessary i.e. Panther Lake, Clearwater Forest, Wildcat Lake .... Risk production ... Nova Lake, Diamond Rapid .... (possible Apple M7) the 35K wafer per month can easily be not enough and / or increase to 40K by the end of the year.
Based on pure volume and the CAPEX spending in Q2 report, it is more likely that Intel will have 6 if not 7 of those ASML High NA, which will enable the smooth transition to 14A, that is 30-40 machine, provide just added Terafab + Intel own needs.
The total they got on the market recently is 18B ???, plus they make 1B in Q2 2026 and forecast at least 1.2-2.2B pure profit very quarter till Q4 2027. That is already another 8-12B in profit. In total, that meant they raised ~30B for everything and that is a lot lot lot more, plus if Elon Musk is truth, some of the Terafab capacity money will be deposit to Intel before Q4 2027 in order to make sense. Plus finally another 3-5B the final milestone payment for the share that Trump purchased.
My friend that is like 30B-40B just like this. I know that there are other cost like buildings ... HVAC ..... but the money is enough to buy 100 of the machines