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Understanding SEMI S3 9.12 for Process Liquid Heating

JohnSHealey

New member
SEMI S3 9.12 requires either a GFCI or a "grounded conductive barrier between the heating element and the HTF". Is a grounded metal immersion heater acceptable to SEMI S3 9.12? The outer case of the immersion heater is grounded. How does SEMI.org define a "grounded conductive barrier"?
 
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