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Proceedings discuss latest progress on EUV Litho at June 2017 conference in Berkeley

U

user nl

Member
The proceedings with the slides of all the lectures/posters presented at the recent June 2017 EUVL conference in Berkeley are available. Click on the individual links of talks in this pdf of the program:
https://www.euvlitho.com/2017/2017 EUVL Workshop Proceedings.pdf

The various talks by INTEL, Globalfoundries, ASML, ZEISS, Inpria, IMEC and many others in the EUV ecosystem provide an interesting and detailed view on the latest progress in R&D and HVM using EUV litho.

User NL
 
Scott will post his EUV update from Semicon West this week. It will be interesting to see if there are differences in the conferences, probably not though. I'm in Taiwan this week and will be talking to EUV people as well. I still do not see EUV as being a significant factor at 7nm. Hopefully 5nm will truly be EUV based versus just bolting it onto a DUV process.
 
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