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Intel moves EUV litho track and scanner from Oregon to Ireland

Fred Chen

Moderator


In a somewhat surprising move, an EUV scanner was de-installed at Intel Oregon and moved to Ireland Fab 34, some months after the same was done with the associated litho resist track.
 


In a somewhat surprising move, an EUV scanner was de-installed at Intel Oregon and moved to Ireland Fab 34, some months after the same was done with the associated litho resist track.
I thought it's more easier and economical to buy a new ASML EUV machine from Netherlands and install it in Ireland by following Oregon's specs and procedures than disassembled one in Oregon USA and reinstalled it in Ireland. Especially a fab needs multiple EUV machines to start a high volume production anyway.
 
I thought it's more easier and economical to buy a new ASML EUV machine from Netherlands and install it in Ireland by following Oregon's specs and procedures than disassembled one in Oregon USA and reinstalled it in Ireland. Especially a fab needs multiple EUV machines to start a high volume production anyway.

This is not a good sign. That is an older system used for R&D not a new production system. Scott wrote about this:

 
Agreed - how far is Intel down the delivery list?
They are behind both TSMC and Samsung but above Hynix and Micron, rumor has it. TSMC is by far the EUV winner with more than half of the EUV systems in the field. It was reported that Pat Gelsinger was in Taiwan last week negotiating for more TSMC capacity after the N3 deal expires. Or maybe Pat is trying to buy some EUV systems from TSMC? Either way Intel has a serious EUV problem. Exciting times in the semiconductor industry, absolutely!
 
Here's another suspicion, analyzed by Dylan Patel (SemiAnalysis):


The article includes a confirmation from Intel:

It is correct that we are shipping some prior-generation tools from Oregon to Ireland. These tools were previously used for technology development, which we do in Oregon. They are now being transitioned into high volume manufacturing in Ireland, while current generation tools are installed in Oregon for a new technology development cycle. This is a completely normal part of our process to extend the useful life of tools, and something we have done for many years. In fact, we also ship tools back to the US, and among our fabs worldwide.

So it looks like Intel tool productivity will naturally lag behind TSMC and maybe even Samsung.
 
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Here's another suspicion, analyzed by Dylan Patel (SemiAnalysis):


The article includes a confirmation from Intel:

It is correct that we are shipping some prior-generation tools from Oregon to Ireland. These tools were previously used for technology development, which we do in Oregon. They are now being transitioned into high volume manufacturing in Ireland, while current generation tools are installed in Oregon for a new technology development cycle. This is a completely normal part of our process to extend the useful life of tools, and something we have done for many years. In fact, we also ship tools back to the US, and among our fabs worldwide.
Are we talking two or three different tools here? I assume Dylan Patel's article only discussed the one made by Tokyo Electron, not the ASML's EUV.

EUV or not, Intel's explanation seems very strange to me. Intel shipped old version but fine tuned tools from Oregon R&D/Tech Support center to production fab in Ireland. Intel said Oregon Tech Center is going to get the newer version of the same type of tool. Intel stated it's a routine operations.

It means Intel is going to use the newer version of the tool in Oregon R&D lab to support and simulate any issues may occur on the older version tool operated in Ireland's production fab.

Does it make sense?
 
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Are we talking two or three different tools here? I assume Dylan Patel's article only discussed the one made by Tokyo Electron, not the ASML's EUV.

EUV or not, Intel's explanation seems very strange to me. Intel shipped old version but fine tuned tools from Oregon R&D/Tech Support center to production fab in Ireland. Intel said Oregon Tech Center is going to get the newer version of the same type of tool. Intel stated it's a routine operations.

It means Intel is going to use the newer version of the tool in Oregon R&D lab to support and simulate any issues may occur on the older version tool operated in Ireland's production fab.

Does it make sense?
I agree the explanation would be strange to apply to the newer EUV tools, including the track. I think it only applies to tools which were used for more than one node already. Channeling all tools through Oregon as an extra stop only slows down the installation at Ireland. Also Ireland would be getting mainly older tools. Yet even so, some older tools can still be shipped directly, such as NXE3400B: https://www.asml.com/en/products/euv-lithography-systems/twinscan-nxe3400b
 
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They can talk about tools moving around but not EUV systems. This is the first time for EUV and it is due to a shortage of EUV systems, not extending the life of equipment. Nice PR spin though but semiconductor insiders know otherwise. SPIE is coming up so we will know more then.
 
I think a lot of capacity under construction is for the assumption that China was to invade taiwan. Now that it seems less likely there isn't enough equipment, people, or customers for intel's capacity under construction. With that said Europe doesn't want to be completely out, something is better than nothing.

Zeiss is dealing with a chip shortage.
 
Yet even so, some older tools can still be shipped directly, such as NXE3400B: https://www.asml.com/en/products/euv-lithography-systems/twinscan-nxe3400b
You assume that ASML continues to produce the older 3400 series concurrent to the newer 3600 series. In a past earnings release (https://www.fool.com/earnings/call-...olding-nv-asml-q3-2021-earnings-call-transcr/), ASML indicates that all of their production is now on the 3600D chassis.
"For EUV, we are still planning for a capacity of around 55 systems next year. These will all be 3600D systems, which deliver a 15% to 20% higher productivity over the 3400C systems."
 
You assume that ASML continues to produce the older 3400 series concurrent to the newer 3600 series. In a past earnings release (https://www.fool.com/earnings/call-...olding-nv-asml-q3-2021-earnings-call-transcr/), ASML indicates that all of their production is now on the 3600D chassis.
"For EUV, we are still planning for a capacity of around 55 systems next year. These will all be 3600D systems, which deliver a 15% to 20% higher productivity over the 3400C systems."
That's to be expected. No one would be ordering a NXE 3400B now I would think. Intel can only move what it has.
 
And Intel could have been ahead in EUV if they had not decreased/eliminated funding to Cymer to go with immersion instead, in the early days of EUV source development.
 
And Intel could have been ahead in EUV if they had not decreased/eliminated funding to Cymer to go with immersion instead, in the early days of EUV source development.
Intel was shy of immersion too, had a dry 45nm node. ASML's acquisition of Cymer was indeed pivotal.
 
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I think a lot of capacity under construction is for the assumption that China was to invade taiwan. Now that it seems less likely there isn't enough equipment, people, or customers for intel's capacity under construction. With that said Europe doesn't want to be completely out, something is better than nothing.

Zeiss is dealing with a chip shortage.

Anybody who worked a years in this industry knows that this buildup is pointless for its defence value. Any disturbance in the CJK region will end up in a semi supply chain collapse.

Semi industry is basically a chemical industry until you reach the stepper. Ultrapure etchants, resists, solvents, buffers, chemicals for blank wafer making, targets, other consumables will be all gone, and the know-how of things like super-duper ultra low outgas plastics will be gone along with Taiwanese chem industry. Packaging tech is also all in Asia.

The world economy will run out of semiconductor stocks within months, invariably if Taiwanese fabs outside of Taiwan will run, or not.
 
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