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EBeam on the rocks? Mapper is bankrupt.


I stumbled over this: [FONT=Verdana,Arial,Tahoma,Calibri,Geneva,sans-serif]
January 4th of this year.

Assets acquired by ASML in auction: [FONT=Verdana,Arial,Tahoma,Calibri,Geneva,sans-serif]
and some employees too: [FONT=Verdana,Arial,Tahoma,Calibri,Geneva,sans-serif]

Were there any other viable eBeam lithography efforts? I recall there was some kind of mirror/reflection modulation system where the electrons turn corners on their path to block contamination, but have seen nothing about that in production. Is eBeam all gone? Sure, ASML may have an interest in keeping it for mask production but seems unlikely they would explore ways it could compete with EUV.[/FONT][SUB][SUP]<strike>