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Search results

  1. J

    EUV for older nodes?

    I want to understand if EUV can have any impact on 10 nm or older nodes in a few years as EUV machines become more advanced and widely available. Almost all recent pre-EUV nodes use SADP, SAQP and a large number of masks to get the feature size lower than the diffraction limit of excimer lasers...
  2. J

    What are your thoughts on Gigaphoton?

    Gigaphoton is a maker of Excimer lasers for DUV lithography. They have also been developing an EUV aligner and gave an impressive talk at Photonics West in 2017. They have a 60% market share in excimer laser market for DUV and seem to be competing against ASML and its subsidiary Cymer. I am a...
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