Advanced CMOS Technology 2021

Course Description

The central theme of this seminar is an in-depth presentation of the key 7/5 nm node Advanced CMOS Technology issues for Logic and Memory, including detailed process flows for these technologies.

This course addresses the issues associated with Advanced CMOS manufacturing with technical depth and conceptual clarity, and presents leading-edge process solutions to the new and novel set of problems presented by 7nm and 5 nm FinFET technology and previews the upcoming manufacturing issues of 3nm Nanosheets.

A key part of the course is a visual survey of leading-edge devices in Logic and Memory presented by the Fellow Emeritus of the world’s leading reverse engineering firm, TechInsights. His lecture is a visual feast of TEMs and SEMs of all of the latest and greatest devices being manufactured and is one of the highlights of the course.

An update on the status of EUV lithography will be also be presented by a world-class lithographer who manages an EUV Lithography tool. His explanations of how this technology works, and the latest EUV breakthroughs, are enlightening as they are insightful.

Finally, a detailed technology roadmap for the future of Logic evolution, 3D NAND Flash Memory and DRAM process integration, as well as 3D packaging and 3D Monolithic fabrication will also be discussed.

Each section of the course will present the relevant technical issues in a clear and comprehensible fashion as well as discuss the proposed range of solutions and equipment requirements necessary to resolve each issue.

Course Notes:

The course notes are technically current, reproduced in high-resolution color and profusely illustrated with 700+ pages of high-quality 3D graphics and TEMs of real-world devices.

In addition, dynamic 3D models of semiconductor micro-structures are presented on-screen to clarify the structural details of FinFETs 3D Flash and Nanowires. Click on the link below to preview a typical dynamic 3D image.

This is the one course this year that you do not want to miss!